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US 11,239,382 B2Granted
Semiconductor photomultiplier
AssigneeSensL Technologies Ltd.
InventorsKevin O'Neill, Liam Wall, John Carlton Jackson
Life of this patent
Estimating the term…
Abstract
A semiconductor photomultiplier includes a microcell, a photosensitive diode, and an anti-reflective coating. The microcell has an insulating layer formed over an active region. The photosensitive diode is formed in the active region beneath the insulating layer. The anti-reflective coating is provided on the insulating layer.
Claims20
A semiconductor photomultiplier having an array of microcells, each microcell comprising:
- an active region;
- a photosensitive diode having a PN junction in the active region;
- an insulating layer over the active region;
- a dielectric layer over a first portion of the insulating layer but not over a second portion of the insulating layer different from the first portion, the second portion defining a trench forming an optical pathway for transmission of light to the photosensitive diode in the active region;
- and
- an anti-reflective coating formed on the second portion of the insulating layer in the optical pathway,
- wherein each of the insulating layer and the anti-reflective coating overlies the entire trench.
4 more elements
A semiconductor photomultiplier comprising a plurality of microcells, each microcell comprising:
- an active region having a photosensitive diode having a PN junction formed therein;
- an insulating layer over the PN junction of the photosensitive diode and directly above the active region;
- an anti-reflective coating on the insulating layer;
- and
- a dielectric layer overlying a first portion of the active region having an interconnect to the active region formed therein but not over a second portion of the insulating layer different from the first portion, the second portion defining a trench forming an optical window overlying the anti-reflective coating, a portion of the insulating layer, and said second portion of the active region,
- wherein each of the insulating layer and the anti-reflective coating overlies the entire trench.
3 more elements
Dependencies are inferred from the claim text.