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US 11,239,370 B2Granted
TFT substrate and scanning antenna provided with TFT substrate
AssigneeSharp Kabushiki Kaisha
InventorKatsunori Misaki
Life of this patent
Estimating the term…
Abstract
A TFT substrate includes a dielectric substrate and a plurality of antenna unit regions arranged on the dielectric substrate. Each of the plurality of antenna unit regions includes a TFT, a patch electrode electrically connected to a drain electrode of the TFT, and a patch drain connection section electrically connecting the drain electrode to the patch electrode, and the patch drain connection section includes a conductive portion included in a conductive layer, the conductive layer being closer to the dielectric substrate than a conductive layer including the patch electrode and being either one of a conductive layer including a gate electrode of the TFT or a conductive layer including a source electrode of TFT, the either one being closer to the dielectric substrate than the other.
Claims19
A TFT substrate comprising:
- a dielectric substrate;
- a plurality of antenna unit regions arranged on the dielectric substrate, each of the plurality of antenna unit regions including:
- a TFT,
- a patch electrode electrically connected to a drain electrode of the TFT, and
- a patch drain connection section electrically connecting the drain electrode to the patch electrode, wherein
- the patch drain connection section includes a conductive portion included in a conductive layer, the conductive layer being closer to the dielectric substrate than a conductive layer including the patch electrode and being either one of a conductive layer including a gate electrode of the TFT or a conductive layer including a source electrode of TFT, the either one being closer to the dielectric substrate than the other;
- a gate metal layer supported by the dielectric substrate and including the gate electrode;
- a source metal layer supported by the dielectric substrate and including the source electrode;
- a semiconductor layer supported by the dielectric substrate;
- a gate insulating layer formed between the gate metal layer and the semiconductor layer;
- a first insulating layer formed on the gate metal layer and the source metal layer;
- and
- a patch metal layer formed between the gate insulating layer and the first insulating layer, and including the patch electrode;
- wherein
- the patch electrode is included in the conductive layer different from any of the conductive layer including the gate electrode of the TFT and the conductive layer including the source electrode of the TFT.
12 more elements
A TFT substrate comprising:
- a dielectric substrate;
- a plurality of antenna unit regions arranged on the dielectric substrate, each of the plurality of antenna unit regions including:
- a TFT,
- a patch electrode electrically connected to a drain electrode of the TFT, and
- a patch drain connection section electrically connecting the drain electrode to the patch electrode, and the patch drain connection section includes a conductive portion included in a conductive layer closer to the dielectric substrate than a conductive layer including the patch electrode, and an additional conductive portion included in the conductive layer including the patch electrode, and formed physically separate from the patch electrode;
- a gate metal layer supported by the dielectric substrate and including a gate electrode;
- a source metal layer supported by the dielectric substrate and including a source electrode;
- a semiconductor layer supported by the dielectric substrate;
- a gate insulating layer formed between the gate metal layer and the semiconductor layer;
- a first insulating layer formed on the gate metal layer and the source metal layer;
- and
- a patch metal layer formed between the gate insulating layer and the first insulating layer, and including the patch electrode;
- wherein
- the patch electrode is included in the conductive layer different from the conductive layer closer to the dielectric substrate.
11 more elements
A TFT substrate comprising:
- a dielectric substrate;
- and
- a plurality of antenna unit regions arranged on the dielectric substrate, each of the plurality of antenna unit regions including:
- a TFT,
- a patch electrode electrically connected to a drain electrode of the TFT, and
- a patch drain connection section electrically connecting the drain electrode to the patch electrode, wherein
- the patch drain connection section includes a conductive portion included in a conductive layer, the conductive layer being closer to the dielectric substrate than a conductive layer including the patch electrode and being either one of a conductive layer including a gate electrode of the TFT or a conductive layer including a source electrode of TFT, the either one being closer to the dielectric substrate than the other;
- and
- the patch electrode is included in the conductive layer, the conductive layer being either one of the conductive layer including the gate electrode of the TFT or the conductive layer including the source electrode of TFT, the either one being farther from the dielectric substrate than the other.
6 more elements
Dependencies are inferred from the claim text.