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US 11,239,369 B2Granted
Vertical thin film transistor
AssigneeInternational Business Machines Corporation
InventorEffendi Leobandung
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes a stack of layers stacked vertically and including a source layer, a drain layer and a channel layer between the source layer and the drain layer. A gate electrode is formed in a common plane with the channel layer and a gate dielectric is formed vertically between the gate electrode and the channel layer. A first contact contacts the stack of layers on a first side of the stack of layers, and a second contact formed on an opposite side vertically from the first contact.
Claims20
A semiconductor device;
- comprising:
- a stack of layers on a dielectric layer, wherein the stack of layers is stacked vertically and includes a source layer, a drain layer and a channel layer between the source layer and the drain layer;
- a first conductive contact directly connected electrically to the drain layer of the stack of layers;
- a first metal line directly connected electrically to the first conductive contact;
- a second conductive contact in the dielectric layer, wherein the dielectric layer is on opposite sides of the second conductive contact, and wherein the second conductive contact is electrically connected to the source layer of the stack of layers;
- a barrier metal layer that functions as a diffusion barrier having a wider portion in direct contact with the source layer and a narrower portion in direct contact with the second conductive contact;
- and
- a dielectric barrier layer on the dielectric layer, wherein a portion of the dielectric barrier layer is in direct contact with both the wider portion and the narrower portion of the barrier metal layer.
5 more elements
A semiconductor device, comprising:
- a substrate having front end of the line (FEOL) devices formed thereon;
- a cross bar grid including a plurality of first metal lines and a plurality of second metal lines formed transversely to the plurality of first metal lines;
- back end of the line (BEOL) vertical transistors formed on a dielectric layer, the vertical transistors each including:
- a stack of layers stacked vertically and including a source layer, a drain layer and a channel layer between the source layer and the drain layer;
- a first conductive contact directly connecting electrically the drain layer to a first line of the plurality of first metal lines;
- a second conductive contact on an opposite side of the stack of layers from the first contact and connecting electrically the source layer to a second line of the plurality of second metal lines;
- and
- a barrier metal layer that functions as a diffusion barrier having a wider portion in direct contact with the source layer and a narrower portion in direct contact with the second conductive contact;
- and
- a dielectric barrier layer directly on the dielectric layer, wherein a portion of the dielectric harrier layer is in direct contact with both the wider portion and the narrower portion of the barrier metal layer, and wherein the portion of the dielectric barrier layer is between the dielectric layer and the wider portion of the barrier metal layer.
7 more elements
Dependencies are inferred from the claim text.