Semiconductor apparatus

A semiconductor apparatus comprising:

• a semiconductor substrate having a first main surface and a second main surface;
• a first electrode opposing the first main surface of the semiconductor substrate;
• a dielectric layer entirely between the semiconductor substrate and the first electrode such that the first electrode does not contact the semiconductor substrate;
• a second electrode opposing the second main surface of the semiconductor substrate;
• and
• a resistance control layer between the semiconductor substrate and the second electrode,
• wherein the resistance control layer includes a first region that has a first electrical resistivity and that electrically connects the semiconductor substrate and the second electrode, and a second region that has a second electrical resistivity higher than the first electrical resistivity of the first region and is adjacent to the first region, and
• wherein the first region of the resistance control layer has one or a combination of a circular shape and an ellipse shape when viewing the second main surface of the semiconductor substrate in a plan view thereof.