E-fuse with dielectric zipping

A method of forming an e-fuse device, the method comprising the steps of:

• depositing a first dielectric layer onto a substrate;
• forming at least one first electrode of the e-fuse device in the first dielectric layer;
• depositing a second dielectric layer onto the first dielectric layer;
• patterning vias in the second dielectric layer, wherein at least one of the vias is present over the at least one first electrode and is patterned having a critical dimension of CDA′;
• depositing a liner into, and lining, each of the vias whereby attractive forces between the liner deposited along opposite sidewalls of the vias reduce the critical dimension of the at least one via present over the at least one first electrode to CDA″, wherein CDA″<CDA′;
• and
• filling the vias with a metal to form a second electrode of the e-fuse device.

A method of operating an e-fuse device, the method comprising the steps of:

• providing the e-fuse device comprising:
• a first dielectric layer disposed on a substrate;
• at least one first electrode of the e-fuse device present in the first dielectric layer, wherein the at least one first electrode comprises a cathode of the e-fuse device;
• a second dielectric layer disposed on the first dielectric layer;
• vias present in the second dielectric layer, wherein at least one of the vias is present over the at least one first electrode and has a critical dimension CDA″, wherein the vias adjacent to the at least one via having the critical dimension CDA″ each have a critical dimension of CDB″, and wherein CDB″>CDA″;
• a liner disposed in each of the vias;
• a metal that serves as a second electrode of the e-fuse device disposed in each of the vias over the liner, wherein the second electrode comprises an anode of the e-fuse device, and wherein the liner comprises an e-fuse element that provides an electrical path between the cathode and the anode;
• and
• passing a programming current through the e-fuse element to cause the e-fuse element to rupture and thereby open the electrical path between the cathode and the anode.