Tool monitoring device and method of monitoring tool

A method of monitoring a tool, the method comprising:

• monitoring an environmental parameter of a load port, wherein the environmental parameter comprises a contamination level, and monitoring the contamination level is performed by mounting a particle counter on a pin arranged on the load port;
• transmitting the environmental parameter to a data collection system;
• recording the environmental parameter in a time-based manner to show a trend of the environmental parameter by the data collection system;
• and
• determining whether an abnormal trend is observed based on the recording.

A system for monitoring a tool, the system comprising:

• a wafer pod, the wafer pod comprising a base plate, the base plate having a plurality of holes adapted to receive pins on a load port of the tool;
• a plurality of particle counters in the holes and configured to monitor a contamination level of the load port;
• a first sensor disposed in the wafer pod;
• a power supply disposed in the wafer pod and electrically coupled to the first sensor;
• a wireless unit disposed in the wafer pod and coupled to the first sensor;
• and
• a transporting system configured to transfer the wafer pod from one load port to another load port.