Charged particle beam device

A charged particle beam device for generating an image of a sample, comprising:

• a charged particle source for generating a charged particle beam;
• a deflector that scans the sample with the charged particle beam emitted from the charged particle source;
• a detector that detects a charged particle obtained upon irradiation of the sample with the charged particle beam;
• one or more computer systems that controls the deflector and generates the image of the sample based on an output of the detector;
• and
• a graphical user interface that displays a parameter space and allows a user to select an operation parameter of the charged particle beam device,
• wherein:
• the parameter space includes a dimension, and
• the graphical user interface is configured to display an inside of the parameter space with the dimension in an identifiable manner in accordance with a signal of the image when the sample is scanned with the charged particle beam.

A charged particle beam device for generating an image of a sample, comprising:

• a charged particle source for generating a charged particle beam;
• a deflector that scans the sample with the charged particle beam emitted from the charged particle source;
• a detector that detects a charged particle obtained upon irradiation of the sample with the charged particle beam;
• one or more computer systems that controls the deflector and generates the image of the sample based on an output of the detector;
• and
• a graphical user interface that displays a setting field for setting a beam irradiation of the deflector, and also displays a display field for displaying at least one of layout data or the image generated based on the output of the detector,
• wherein:
• the graphical user interface is configured to allow a plurality of areas to be set on at least one of the layout data or the image, and
• the one or more computer systems controls the deflector based on a condition that has been set on the graphical user interface.