Method for generating extreme ultraviolet radiation and an extreme ultraviolet (EUV) radiation source

A method for generating extreme ultraviolet (EUV) radiation, comprising

• introducing a fuel droplet into a chamber;
• applying a first laser beam to strike the fuel droplet at a first location to generate EUV radiation and form a movable debris of the fuel droplet;
• collecting the EUV radiation;
• forming an optical trap proximal to the first location of the first laser beam strike to trap the movable debris;
• accelerating the movable debris toward the optical trap;
• trapping the movable debris in the optical trap and keeping the movable debris in a second location proximal to the first location;
• and
• purging the trapped movable debris out of the chamber from the second location.

An extreme ultraviolet (EUV) radiation source, comprising:

• a fuel droplet generator configured to provide a fuel droplet to a chamber;
• a first laser configured to generate a first laser beam to strike the fuel droplet at a first location to generate EUV radiation and form a movable debris of the fuel droplet;
• a collector configured to reflect the EUV radiation toward an exit aperture of the chamber;
• and
• an optical trap configured to trap the movable debris and keep the movable debris in a second location proximal to the first location, wherein the optical trap is proximal to the first location of the first laser beam strike.