Converter and conversion method for converting click position of display into light pen simulated signal for semiconductor manufacturing machine

A conversion method for converting a click position of a flat panel display into a light pen simulated signal for a semiconductor manufacturing machine, comprising:

• obtaining a first display resolution of the flat panel display from a memory;
• obtaining a second display resolution of the semiconductor manufacturing machine from the memory, wherein the first display resolution is different from the second display resolution;
• converting the click position into a light pen position according to a mapping table of the first and second display resolutions;
• and
• providing the light pen simulated signal to the semiconductor manufacturing machine according to the light pen position and a synchronization signal from the semiconductor manufacturing machine.

A semiconductor manufacturing system, comprising:

• a semiconductor manufacturing machine;
• a flat panel display, configured to display a graphical user interface (GUI) of the semiconductor manufacturing machine;
• and
• a converter coupled between the semiconductor manufacturing machine and the flat panel display, configured to obtain a first display resolution of the semiconductor manufacturing machine and a second display resolution of the flat panel display from a memory, to convert a click position from the flat panel display into a light pen position according to the first and second display resolutions, and to provide a light pen simulated signal to the semiconductor manufacturing machine according to the light pen position and a synchronization signal from the semiconductor manufacturing machine.