Temperature control system including multiple valves and temperature control method
AssigneeTokyo Electron Limited
InventorsKei Kobayashi, Takehiko Arita
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AssigneeTokyo Electron Limited
InventorsKei Kobayashi, Takehiko Arita
Estimating the term…
A temperature control system includes a first pump, a second pump, a temperature adjusting unit, a first flow passage, a second flow passage, a first valve disposed in the first flow passage, a second valve disposed in the second flow passage, a first bypass flow passage connecting the first flow passage to the second flow passage on the temperature adjusting unit side of the first and second valves, a second bypass flow passage connecting the first flow passage to the second flow passage on the flow passage side of the first and second valves, a third valve disposed in the first bypass flow passage, and a fourth valve disposed in the second bypass flow passage. At least one of a pair of the first valve and the second valve, and a pair of the third valve and the fourth valve is a pair of flow rate adjustable valves.
A system for controlling a temperature of a target having an internal flow passage having an inlet and an outlet, the system comprising:
The system as claimed in claim25, further comprising:
A system for controlling a temperature of a target having an internal flow passage having an inlet and an outlet, the system comprising:
A method of controlling a temperature of a target by a system, the target having a flow passage having an inlet and an outlet, the system comprising:
Dependencies are inferred from the claim text.