Information processing device, program, process treatment executing device, and information processing system

A process treatment executing device that applies process treatment to a workpiece, the process treatment executing device comprising:

• a processor, and
• a memory device storing a computer program that causes the processor to execute processes including
• storing a plurality of model data elements each of which reproduces a change in state data of a workpiece, each of the model data elements being constructed, as an effect of a minimum unit of process treatment, from differential data between initial state data of a plurality of workpieces and end state data of the plurality of workpieces, the end state data of the plurality of workpieces being the state data of the plurality of workpieces to which the minimum unit of the process treatment is applied under a predetermined process condition;
• receiving an input of the initial state data of an objective workpiece and target end state data of the objective workpiece;
• predicting, for a plurality of combinations of the plurality of model data elements, end state data of the objective workpiece from the initial state data of the objective workpiece received, by using a corresponding combination of the plurality of combinations of the plurality of model data elements;
• selecting a combination of the plurality of model data elements based on a proximity between the predicted end state data of the objective workpiece and the target end state data of the objective workpiece received;
• and
• determining a process condition of process treatment to be applied to, the objective workpiece, based on the selected combination of the plurality of model data elements.

An information processing system comprising:

• a process treatment executing device configured to apply process treatment to a workpiece, and
• an information processing device configured to determine the process treatment and a process condition that are applied by the process treatment executing device to the workpiece, the information processing device including a processor, and a memory device storing a computer program that causes the processor to execute processes including
• storing a plurality of model data elements each of which reproduces a change in state data of a workpiece, each of the model data elements being constructed, as an effect of a minimum unit of process treatment, from differential data between initial state data of a plurality of workpieces and end state data of the plurality of workpieces, the end state data of the plurality of workpieces being, the state data of the plurality of workpieces to which the minimum unit of the process treatment is applied under a predetermined process condition;
• receiving an input of the initial state data of an objective workpiece and target end state data of the objective workpiece;
• predicting, for a plurality of combinations of the plurality of model data elements, end state data of the objective workpiece horn the initial state data of the objective workpiece received, by using a corresponding combination of the plurality of combinations of the plurality of model data elements;
• selecting a combination of the plurality of model data elements based on a proximity between the predicted end state data of the objective workpiece and the target end state data of the objective workpiece received;
• and
• determining a process condition of process treatment to be applied to the objective workpiece, based on the selected comb nation of the plurality of model data elements.