Substrate processing apparatus, device management controller, and recording medium

A substrate processing apparatus comprising at least:

• a device management controller configured to:
• monitor a state of parts constituting the substrate processing apparatus;
• monitor integrity of device data obtained from an operation state of the parts constituting the substrate processing apparatus;
• and
• monitor facility data provided from a factory facility to the substrate processing apparatus;
• and
• a storage part that stores a device information and an IP address of a master apparatus,
• wherein the device management controller is configured to:
• make a communication connection with the master apparatus with the IP address and then collate a device information of the master apparatus acquired by the communication connection with the device information of the master apparatus stored in the storage part;
• and
• acquire a file from the master apparatus when the device information match each other in a collation and collate the acquired file of the master apparatus with a file of the substrate processing apparatus.

A device management controller configured to:

• monitor a state of parts constituting the substrate processing apparatus;
• monitor integrity of device data obtained from an operation state of the parts constituting the substrate processing apparatus;
• monitor facility data provided from a factory facility to the substrate processing apparatus;
• access a storage part that stores a device information and an IP address of a master apparatus;
• make a communication connection with the master apparatus with the IP address and then collate a device information of the master apparatus acquired by the communication connection with the device information of the master apparatus stored in the storage part;
• and
• acquire a file from the master apparatus when the device information match each other in a collation, and collate the acquired file of the master apparatus with a file of the substrate processing apparatus.

A non-transitory computer-readable recording medium storing a program that causes a substrate processing apparatus to perform a process, wherein the substrate processing apparatus comprises a device management controller and a storage part that stores a device information and an IP address of a master apparatus, the process comprising:

• monitoring a state of parts constituting the substrate processing apparatus;
• monitoring integrity of device data obtained from an operation state of the parts constituting the substrate processing apparatus;
• monitoring facility data provided from a factory facility to the substrate processing apparatus;
• making a communication connection with the master apparatus with the IP address and then collate a device information of the master apparatus acquired by the communication connection with the device information of the master apparatus stored in the storage part;
• and
• acquiring a file from the master apparatus when the device information match each other in a collation, and collating the acquired file of the master apparatus with a file of the substrate processing apparatus.

A device management controller configured to:

• monitor a state of parts constituting the substrate processing apparatus;
• monitor integrity of device data obtained from an operation state of the parts constituting the substrate processing apparatus;
• monitor facility data provided from a factory facility to the substrate processing apparatus;
• access a storage part that stores a device information and an IP address of a master apparatus;
• and
• make a communication connection with the master apparatus with the IP address and then collate a device information of the master apparatus acquired by the communication connection with the device information of the master apparatus stored in the storage part;
• and
• acquire a file from the master apparatus when the device information match each other in a collation, and set the acquired file to be a file of the substrate processing apparatus.

A non-transitory computer-readable recording medium storing a program that causes a substrate processing apparatus to perform a process, wherein the substrate processing apparatus comprises a device management controller and a storage part that stores a device information and an IP address of a master apparatus, the process comprising:

• monitoring a state of parts constituting the substrate processing apparatus;
• monitoring integrity of device data obtained from an operation state of the parts constituting the substrate processing apparatus;
• monitoring facility data provided from a factory facility to the substrate processing apparatus;
• making a communication connection with the master apparatus with the IP address and then collate a device information of the master apparatus acquired by the communication connection with the device information of the master apparatus stored in the storage part;
• and
• acquiring a file from the master apparatus when the device information match each other in a collation, and setting the acquired file to be a file of the substrate processing apparatus.