Reflective optical element for a radiation beam
AssigneeASML Netherlands B.V.
InventorsRamon Mark Hofstra, Andrey Sergeevich Tychkov, Francois Charles Dominique Deneuville, Gerardus Hubertus Petrus Maria Swinkels, Petrus Adrianus Theodorus Maria Ruijs
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Abstract
A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermal conditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner.
Claims16
A system for directing a radiation beam, the system comprising:
- a reflective optical element comprising a body defining a reflective surface configured to receive and partially reflect the radiation beam;
- a first thermal conditioning mechanism;
- a second thermal conditioning mechanism;
- and
- a controller;
- wherein:
- the first thermal conditioning mechanism is configured to transport away from a first portion of the body heat generated by partial absorption of the radiation beam by the reflective optical element;
- the second thermal conditioning mechanism is configured to control, under control of the controller, a shape of the reflective surface via thermally inducing a deformation of a second portion of the body;
- and
- the second portion has a lower thermal conductivity than the first portion.
A system for directing a radiation beam, the system comprising:
- a reflective optical element comprising a body defining a reflective surface configured to receive and partially reflect the radiation beam;
- a first thermal conditioning mechanism;
- a second thermal conditioning mechanism;
- and
- a controller;
- wherein:
- the first thermal conditioning mechanism is configured to transport heat away from a first portion of the body that is generated by partial absorption of the radiation beam by the reflective optical element;
- the second thermal conditioning mechanism is configured to control a shape of the reflective surface via thermally inducing a deformation of a second portion of the body under control of the controller;
- and
- the second portion has a lower thermal conductivity than the first portion;
- and wherein:
- the body of the reflective optical element has a side other than adjacent the reflective surface;
- the side of the body has a non-flat profile when the body is not subjected to the thermally induced deformation;
- and
- the second thermal conditioning mechanism comprises one or more thermo-electric elements and is configured to co-determine the thermally induced deformation of the body.
Dependencies are inferred from the claim text.