Adjustment assembly and substrate exposure system comprising such an adjustment assembly

Method for adjusting a position of a first part of a series of mechanically linked components with respect to a second part of the series of mechanically linked components, comprising:

• providing a mechanical adjustment assembly comprising at least two pairs of first and second bellows and at least two conduits, wherein each conduit interconnects said first bellows and said second bellows of an associated pair for forming a hydraulic system and wherein said mechanical adjustment assembly is configured to adjust, in a direction parallel to a vertical axis, a relative position of the first part and the second part and to adjust a tilt of at least one of the first part and the second part around an axis perpendicular to the vertical axis,
• arranging said first bellows between said first part and said second part of said series of mechanically linked components,
• arranging the second bellows spaced apart from said first bellows, and
• actuating the second bellows, thereby causing actuation of the first bellows, such as to adjust the position of the first part of mechanically linked components with respect to the second part of the series of mechanically linked components.

Substrate exposure system comprising:

• a frame,
• a substrate support module for carrying a substrate, which substrate support module is connected to said frame,
• an exposure apparatus, wherein the exposure apparatus is carried by said frame and is arranged for exposing the substrate carried by the substrate support module, and
• an adjustment assembly for adjusting the position of the exposure apparatus with respect to the substrate support module, wherein the adjustment assembly comprises a hydraulic actuator, a hydraulic generator and a conduit, wherein the conduit interconnects said hydraulic actuator and said hydraulic generator for forming a hydraulic system,
• wherein the exposure apparatus, the frame, the adjustment assembly and the substrate support module are arranged as parts of a series of mechanically linked components, wherein said series of mechanically linked components comprises a first part comprising at least the exposure apparatus, and a second part comprising at least the substrate support module, and wherein said hydraulic actuator is arranged between said first part and said second part of said series of the mechanically linked components, and the hydraulic actuator is arranged between the frame and the substrate support module.