Substrate carrying device, and photoresist coating development device
AssigneesMianyang Boe Optoelectronics Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsGuofeng Jia, Cui Zhang
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AssigneesMianyang Boe Optoelectronics Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsGuofeng Jia, Cui Zhang
Estimating the term…
This disclosure provides a substrate carrying device and a photoresist coating development device, and belongs to the field of display technologies. The substrate carrying device includes two carrying mechanisms opposite to each other, and a driving mechanism between the two carrying mechanisms. Each of carrying mechanisms includes a guiding assembly and a plurality of supports. The guiding assembly includes a guide and a moving member in cooperation with each other. The guide is configured to guide the moving member to move along a preset trajectory. The supports are secured to the moving member and are configured to carry the substrate together. The driving mechanism is capable of simultaneously driving movement of the moving members of the two carrying mechanisms.
A substrate carrying device, comprising:
A photoresist coating development device comprises a substrate carrying device, wherein the substrate carrying device comprises:
A substrate carrying device, comprising:
Dependencies are inferred from the claim text.