Process system and operating method thereof

A method, comprising:

• controlling, by a master controller, a local controller through a switch;
• generating, by a target droplet generator in a process chamber, target droplets;
• generating, by a droplet illumination module in the process chamber, a first light beam and a second light beam to the target droplets, wherein an output power of the second light beam is higher than an output power of the first light beam, and a wavelength of the second light beam is longer than a wavelength of the first light beam;
• generating, by a pre-pulse laser and a main pulse laser in the process chamber, a pre-pulse light beam and a main-pulse light beam respectively, wherein the pre-pulse laser and the main pulse laser are different from the droplet illumination module,
• synchronizing, by the local controller, the target droplet generator and the pre-pulse laser according to the first light beam and the second light beam;
• generating, by the process chamber, a data according to a feedback signal of a EUV light generation process to the local controller, wherein the feedback signal indicates errors in parameters associated with timing and focus of the pre-pulse light beam and the main-pulse light beam;
• writing, by the local controller, the data to a data storage, wherein writing the data to the data storage is independent from the switch;
• and
• communicating, by the local controller controlled by the master controller, directly with the process chamber.

A method, comprising:

• generating, by a target droplet generator, target droplets in a first rate;
• generating, by a droplet illumination module, a first light beam and a second light beam to target droplets, wherein an output power of the second light beam is higher than an output power of the first light beam, and a wavelength of the second light beam is longer than a wavelength of the first light beam;
• deforming, by a pre-pulse laser, the target droplets;
• stimulating, by a main pulse laser, the target droplets to emit a EUV light, wherein the pre-pulse laser and the main pulse laser are different from the droplet illumination module;
• receiving, by a photo detector, the EUV light to generate a feedback signal;
• generating, by the photo detector, data in response to the feedback signal, wherein the feedback signal indicates errors in parameters associated with timing and focus of a pre-pulse light beam of the pre-pulse laser and a main-pulse light beam of the main pulse laser;
• controlling, by a master controller, a local controller through a switch;
• transmitting the data to the local controller controlled by the master controller through the switch;
• writing, by the local controller, the data to a data storage, wherein writing the data is performed without the switch;
• and
• communicating, by the local controller controlled by the master controller, directly with the main pulse laser.