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US 11,237,481 B2Granted
Metal plate for manufacturing deposition mask and manufacturing method for metal plate, and deposition mask and manufacturing method for deposition mask
AssigneeDai Nippon Printing Co., Ltd.
InventorsHiroki Oka, Sachiyo Matsuura, Chiaki Hatsuta, Chikao Ikenaga, Hideyuki Okamoto, Masato Ushikusa
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Abstract
The metal plate includes a plurality of pits located on the surface of the metal plate. The manufacturing method for a metal plate for use in manufacturing of a deposition mask includes an inspection step of determining a quality of the metal plate based on a sum of volumes of a plurality of pits located at a portion of the surface of the metal plate.
Claims5
A metal plate for use in manufacturing of a deposition mask,
- the metal plate including pits located on a surface of the metal plate;
- wherein the surface includes an inspection area having an area of 0.1 mm2 or more and some of the pits are located in the inspection area;
- wherein the metal plate has a corrected pit volume density of 15,000 μm3/mm2 or less, the corrected pit volume density being calculated by dividing a corrected pit volume by the area of the inspection area;
- wherein the corrected pit volume is a sum of volumes of parts of the pits located in the inspection area, said parts of the pits being 0.2 μm or more away from the surface in the thickness direction of the metal plate;
- wherein the volumes of said part of the pits are calculated based on results for depths of the pits located in the inspection area, the depths being measured with a laser microscope.
2 more elements
A deposition mask, comprising
- a metal plate including pits located on a surface;
- and
- through-holes formed in the metal plate,
- wherein the surface includes an inspection area having an area of 0.1 mm2 or more and some of the pits are located in the inspection area;
- wherein the metal plate has a corrected pit volume density of 15,000 μm3/mm2 or less, the corrected pit volume density being calculated by dividing a corrected pit volume by the area of the inspection area;
- wherein the corrected pit volume is a sum of volumes of parts of the pits located in the inspection area, said parts of the pits being 0.2 μm or more away from the surface in the thickness direction of the metal plate;
- wherein the volumes of said parts of the pits are calculated based on results for depths of the pits located in the inspection area, the depths being measured with a laser microscope.
4 more elements
Dependencies are inferred from the claim text.