Configuring optical layers in imprint lithography processes
AssigneeMolecular Imprints, Inc.
InventorsVikramjit Singh, Michael N. Miller, Frank Y. Xu, Christopher Fleckenstein
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Abstract
An imprint lithography method of configuring an optical layer includes depositing a set of droplets atop a side of a substrate in a manner such that the set of droplets do not contact a functional pattern formed on the substrate. The imprint lithography method further includes curing the set of droplets to form a spacer layer associated with the side of the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the set of droplets at a position spaced apart from the functional pattern.
Claims19
An imprint lithography method of configuring an optical layer, the imprint lithography method comprising:
- depositing a first set of droplets onto a substrate that comprises a functional pattern;
- curing the first set of droplets to form a spacer layer associated with the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the first set of droplets depositing a second set of droplets atop the substrate such that each droplet of the second set of droplets is respectively dispensed atop a droplet of the first set of droplets;
- and
- curing the second set of droplets to increase a height of the spacer layer, wherein a first number of droplets in the first set of droplets is not equal to a second number of droplets in the second set of droplets such that the spacer layer has a variable height.
An optical layer, comprising:
- a substrate;
- a functional pattern formed on the substrate;
- a first cured set of droplets disposed on the substrate, the first cured set of droplets forming a spacer layer associated with the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the first cured set of droplets;
- and
- a second cured set of droplets, each droplet of the second cured set of droplets atop a cured droplet of the first cured set of droplets, thereby increasing a height of the spacer layer relative to the first cured set of droplets,
- wherein a number of droplets in the first set of cured droplets is not equal to a number of droplets in the second cured set of droplets, such that the spacer layer has a variable height.
Dependencies are inferred from the claim text.