Detecting method and detecting equipment therefor
AssigneesHkc Corporation Limited, Chongqing Hkc Optoelectronics Technology Co., Ltd.
InventorChung-Kuang Chien
Life of this patent
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Abstract
A detecting method and a detecting equipment therefor are provided. The detecting method includes: inspecting whether a display panel has a defective position; after acquiring the defective position of the display panel by the inspecting, using a first focused ion beam generated by a first ion overhaul apparatus to cut the defective position of the display panel, so as to strip a defect at the defective position and observe morphology of defect; using a repair apparatus to perform a repair treatment on the defective position after the defect is stripped. An inspection apparatus for the inspecting of the defective position, the first ion overhaul apparatus and the repair apparatus are sequentially installed on the same production line.
Claims18
A detecting method, comprising:
- inspecting whether a whole glass panel of a display panel has a defective position;
- after acquiring the defective position of the whole glass panel of the display panel by the inspecting, using a first focused ion beam generated by a first ion overhaul apparatus to cut the defective position of the whole glass panel of the display panel, so as to strip a defect at the defective position and observe morphology of defect;
- and
- using a repair apparatus to perform a repair treatment on the defective position to repair the whole glass panel after the defect is stripped;
- wherein an inspection apparatus for the inspecting of the defective position, the first ion overhaul apparatus and the repair apparatus are sequentially installed on a same production line in that order;
- wherein before inspecting whether the whole display panel has the defective position, the detecting method further comprises:
- performing a thin film coating treatment on the whole glass panel of the display panel to obtain a thin film coating layer for highlighting the defective position of the whole glass panel of the display panel;
- wherein the defect at the defective position is a defect of the thin film coating layer.
A detecting equipment, comprising:
- an inspection apparatus, configured to inspect a defective position of a whole glass panel of a display panel;
- a first ion overhaul apparatus, configured to cut the defective position of the whole glass panel of the display panel;
- a repair apparatus, configured to repair the cut defective position of the whole glass panel of the display panel;
- wherein the inspection apparatus, the first ion overhaul apparatus and the repair apparatus are sequentially installed on a same production line in that order;
- wherein the detecting equipment further comprises a thin film coating apparatus, and the thin film coating apparatus is disposed at an upstream position of the inspection apparatus, wherein the thin film coating apparatus is configured to perform a thin film coating treatment on the whole glass panel of the display panel to obtain a thin film coating layer for highlighting the defective position of the whole glass panel of the display panel;
- wherein the defect at the defective position is a defect of the thin film coating layer.
A detecting method, comprising:
- inspecting whether a glass panel of a display panel has a defective position by an inspection apparatus;
- after acquiring the defective position of the glass panel by the inspecting, using a first focused ion beam generated by an ion overhaul apparatus to cut the defective position of the glass panel, so as to strip a defect at the defective position and observe morphology of defect;
- and
- using a repair apparatus to perform a repair treatment on the defective position to repair the glass panel after the defect is stripped;
- wherein the inspection apparatus, the first ion overhaul apparatus and the repair apparatus are sequentially installed on a same production line in that order;
- wherein during using the first focused ion beam generated by the ion overhaul apparatus to cut the defective position of the glass panel, so as to strip the defect at the defective position and observe the morphology of defect, the defective position is observed simultaneously by a microscope to judge whether a strip result meets a requirement for subsequent the repair treatment performed by the repair apparatus, while cutting the defective position to strip the defect;
- wherein during using the repair apparatus to perform the repair treatment on the defective position to repair the glass panel after the defect is stripped, the defective position is monitored in real-time by the same microscope or another microscope, while performing the repair treatment on the defective position.
Dependencies are inferred from the claim text.