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US 11,237,384 B2Granted
Optical scanning device
AssigneeMitsumi Electric Co., Ltd.
InventorYuki Maruyama
Life of this patent
Estimating the term…
Abstract
An optical scanning device includes a mirror that includes a mirror reflection surface, and torsion bars that support the corresponding sides of the mirror and cause the mirror to rotate. The torsion bars are formed of a silicon active layer whose surface is exposed.
Claims9
An optical scanning device, comprising:
- a mirror that includes a mirror reflection surface;
- and
- torsion bars that support corresponding sides of the mirror and cause the mirror to rotate,
- wherein the torsion bars are formed of a silicon active layer whose surface is exposed.
1 more element
Dependencies are inferred from the claim text.