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US 11,237,328 B1Granted
Optical mode converter and method for manufacturing the same
AssigneeNational Sun Yat-Sen University
InventorsChen-Yu Weng, Yi-Jen Chiu, Yang-Jeng Chen, Rih-You Chen, Chung-Wei Hsiao, Wei Lin
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Abstract
An optical mode converter is disclosed. The optical mode converter includes a substrate and a luminescent layer on the substrate. The luminescent layer includes an optical waveguide and an inclined mirror at an end of the optical waveguide. A light signal passes through the optical waveguide and is reflected by the inclined mirror to penetrate into the substrate. A method for manufacturing the optical mode converter is also disclosed.
Claims9
An optical mode converter, comprising:
- a substrate, wherein a thickness of the substrate is 25 to 35 micrometers;
- and
- a luminescent layer on the substrate, wherein the luminescent layer includes an optical waveguide and an inclined mirror at an end of the optical waveguide, and wherein a light signal passes through the optical waveguide and is reflected by the inclined mirror to penetrate into the substrate.
A method for manufacturing an optical mode converter, comprising:
- forming a luminescent layer on a substrate;
- forming an optical waveguide on the luminescent layer and a notch in the optical waveguide by lithography and etching processes, wherein an included angle is formed between an inclined plane of the notch and a light transmission direction of the optical waveguide;
- filling the notch with a bonding material to form an inclined mirror at the notch, wherein a reflecting surface of the inclined mirror faces the substrate;
- grinding and polishing the substrate to a transmittance thickness;
- and
- forming a metal electrode on the luminescent layer by vapor deposition.
3 more elements
Dependencies are inferred from the claim text.