Back to results
US 11,237,306 B2Granted
Method of fabricating optical substrate
AssigneeNational Tsing Hua University
InventorsFan-Gang Tseng, Meng-Ju Pan
Life of this patent
Estimating the term…
Abstract
An optical substrate including a substrate, a plurality of first nanostructures, and a metal structure is provided. The plurality of first nanostructures are located on the substrate, wherein a surface of the plurality of first nanostructures away from the substrate has a plurality of second nanostructures. The metal structure is located on a surface of the plurality of second nanostructures. A method of fabricating the optical substrate is also provided.
Claims6
A method of fabricating an optical substrate, comprising:
- providing a substrate;
- forming a plurality of first nanostructures on the substrate;
- performing an etching process to form a plurality of second nanostructures on a surface of each one of the plurality of first nanostructures away from the substrate, and form recesses between each one of the second nanostructures;
- and
- forming a metal structure to cover on a top surface of the plurality of second nanostructures and not forming the metal structure at a bottom of the recesses, wherein the metal structure is optical-enhancement nanoparticles.
2 more elements
Dependencies are inferred from the claim text.