Magnetic property measuring systems, methods of measuring magnetic property, and methods of fabricating magnetic memory devices using the same
AssigneeSamsung Electronics Co., Ltd.
InventorEunsun Noh
Life of this patent
Estimating the term…
Abstract
A magnetic property measuring system may include a stage configured to load a sample and to rotate the sample about a rotation axis such that the stage rotates the sample by a rotation angle, the rotation axis extending normal to a top surface of the sample. The magnetic property measuring system may further include a polarizer having a first polarization axis, and an analyzer having a second polarization axis. The polarizer and the analyzer may enable the first and second polarization axes to be independently rotated based on the rotation angle of the sample.
Claims9
A magnetic property measuring system, comprising:
- a stage configured to load a sample and to rotate the sample about a rotation axis such that the stage rotates the sample by a rotation angle, the rotation axis extending normal to a top surface of the sample;
- a polarizer having a first polarization axis;
- an analyzer having a second polarization axis;
- and
- a controller configured to control the polarizer and the analyzer to cause each polarization axis of the first and second polarization axes to be independently rotated based on the rotation angle of the sample,
- wherein the controllre is further configured to rotate the stage to rotate the sample by the rotation angle and to cause the first polarization axis to be rotated by a first angle and the second polarization axis to be rotated by a second angle, such that each angle of the first angle and the second angle is in proportion to the rotation angle of the sample.
Dependencies are inferred from the claim text.