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US 11,237,189 B2Granted
Detection device and manufacturing method thereof
AssigneeSiliconware Precision Industries Co., Ltd.
InventorsKuo-Tung Chiang, Cheng-Kun Lee, Jin-Rong Guo
Life of this patent
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Abstract
A detection device includes: a metal body having a plurality of main vias, a plurality of main through holes with insulators formed on the hole walls of the main vias, and a plurality of connecting elements disposed in the main through holes. Therefore, when testing a chip with I/O pins of high density with the detection device, the connecting elements contact the insulator only, without contacting the hole walls of the main vias, and the problem of short circuits can be avoided. A method of forming a detection device is also provided.
Claims16
A detection device, comprising:
- a body having a base, a covering member stacked on the base, a first side, a second side opposing the first side, and a plurality of main vias being in communication with the first side and the second side and penetrating the base and the covering member, each of the main vias having a straight hole wall;
- a plurality of insulators formed on the straight hole walls of the main vias to form a plurality of main through holes in the plurality of main vias, each of the main through holes having an active region being in communication with at least one of the first side and the second side and disposed on at least one of the base and the covering member, each of the main through holes having a step-shaped hole wall at the active region, wherein the active region is in a shape of two steps and comprises a first hole portion, a second hole portion, and a third hole portion that are in communication in a same sequence, the third hole portion is an outermost one of the hole portions and is in communication with at least one of the first side and the second side, the third hole portion is narrower than the second hole portion, and the second hole portion has a width less than a width of the first hole portion;
- and
- a plurality of connecting elements disposed in the main through holes and exposed from at least one of the first side and the second side of the body,
- wherein the active region is wider than the connecting element,
- wherein the first hole portion and the second hole portion are free from being in contact with the connecting element, and
- wherein the connecting element extends from the first side to the second side and protrudes from at least one of the first side and the second side.
4 more elements
A method for fabricating a detection device, comprising:
- providing a body having a first side, a second side opposing the first side, and a plurality of main vias being in communication with the first side and the second side, each of the main vias having a straight hole wall;
- filling in the main vias an insulation material;
- forming in the insulation material a plurality of main through holes to form a plurality of insulators, the insulation material being on the straight hole walls of the main vias and free from filling the main vias completely and the insulators being composed of the insulation material, each of the main through holes having an active region being in communication with at least one of the first side and the second side of the body, each of the main through holes having a step-shaped hole wall at the active region, wherein the active region is in a shape of two steps and comprises a first hole portion, a second hole portion, and a third hole portion that are in communication in a same sequence, the third hole portion is an outermost one of the hole portions and is in communication with at least one of the first side and the second side, the third hole portion is narrower than the second hole portion, and the second hole portion has a width less than a width of the first hole portion;
- and
- disposing in the main through holes a plurality of connecting elements exposed from at least one of the first side and the second side of the body,
- wherein the first hole portion and the second hole portion are free from being in contact with the connecting element, and
- wherein the connecting element extends from the first side to the second side and protrudes from at least one of the first side and the second side.
4 more elements
Dependencies are inferred from the claim text.