Apparatus and method for a scanning probe microscope

A method for examining a sample surface with a scanning probe microscope, the method comprising the steps of:

• a. directing at least one first light beam from at least one first interferometer onto at least one first reflective area arranged in the region of a free end of at least one first cantilever, which has a first measuring tip, wherein the at least one first reflective area comprises at least one first reflective portion and at least one second reflective portion, and wherein the first reflective portion and the second reflective portion are not arranged in a plane;
• b. directing at least one second light beam from at least one second interferometer onto the at least one first reflective area arranged in the region of the free end of the at least one first cantilever, wherein the at least one first reflective area reflects the at least one first light beam and the at least one second light beam in different directions;
• and
• c. using the at least one first light beam reflected by the at least one first reflective area and the at least one second light beam reflected by the at least one first reflective area for the purposes of examining the sample surface.

A non-transitory computer-readable medium storing a computer program comprising instructions which, when they are executed by an apparatus for a scanning probe microscope, the apparatus comprising:

• a1. at least one first measuring probe having at least one first cantilever, a free end of which has a first measuring tip,
• b1. at least one first reflective area arranged in a region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions, wherein the at least one first reflective area comprises at least one first reflective portion and at least one second reflective portion, and wherein the first reflective portion and the second reflective portion are not arranged in a plane, and
• c1. at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine a position of the first measuring tip,
• cause the apparatus to perform method steps comprising:
• a2. directing at least one first light beam from at least one first interferometer onto the at least one first reflective area arranged in the region of the free end of the at least one first cantilever, which has the first measuring tip, wherein the at least one first reflective area comprises the at least one first reflective portion and the at least one second reflective portion, and wherein the first reflective portion and the second reflective portion are not arranged in a plane;
• b2. directing at least one second light beam from at least one second interferometer onto the at least one first reflective area arranged in the region of the free end of the at least one first cantilever, wherein the at least one first reflective area reflects the at least one first light beam and the at least one second light beam in different directions, and
• c2. using the at least one first light beam reflected by the at least one first reflective area and the at least one second light beam reflected by the at least one first reflective area for the purposes of examining the sample surface.