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US 11,237,160 B2Granted
Ultrasensitive sensor based on a piezoelectric transistor
AssigneeInternational Business Machines Corporation
InventorsQing Cao, Jianshi Tang, Ning Li, Ying He
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Abstract
Chemical sensors include a functionalized electrode configured to change surface potential in the presence of an analyte. A piezoelectric element is connected to the functionalized electrode. A piezoresistive element is in contact with the piezoelectric element.
Claims14
A chemical sensor, comprising:
- a functionalized electrode configured to change surface potential in the presence of an analyte;
- a piezoelectric element connected to the functionalized electrode;
- and
- a piezoresistive element in contact with the piezoelectric element.
1 more element
A chemical sensor, comprising:
- a functionalized electrode configured to change surface potential in the presence of an analyte;
- a piezoelectric element connected to the functionalized electrode;
- a piezoresistive element in contact with the piezoelectric element;
- and
- a sensor analysis system configured to measure a current through the piezoresistive element and to compare the measured current to a calibration curve of predetermined concentrations of the analyte to determine an analyte concentration that corresponds to the measured current.
2 more elements
Dependencies are inferred from the claim text.