Thermal pattern sensor with pyroelectric capacitance
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMohammed Benwadih, Amélie Revaux
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Abstract
Thermal pattern sensor comprising several pixels arranged on a substrate, each pixel including at least one pyroelectric capacitance formed by at least one portion of pyroelectric material arranged between at least one lower electrode and at least one upper electrode, with the lower electrode arranged between the substrate and the portion of pyroelectric material, and in which at least one protective dielectric layer is arranged between the portion of pyroelectric material and the upper electrode and comprises at least one of the following materials: fluoropolymer, self-assembled molecular monolayer, dielectric material soluble in a solvent orthogonal to the pyroelectric material.
Claims15
A thermal pattern sensor comprising several pixels arranged on a substrate, each pixel including at least one pyroelectric capacitance formed by at least one portion of pyroelectric material arranged between at least one lower electrode and at least one upper electrode, the at least one portion of pyroelectric material comprising a plurality of porosities and/or holes, with the lower electrode arranged between the substrate and the portion of pyroelectric material, in which at least one protective dielectric layer is arranged between the portion of pyroelectric material and the upper electrode, wherein the at least one protective dielectric layer fills the plurality of porosities and/or holes, and comprises at least one of the following materials:
- self-assembled molecular monolayer, or dielectric material soluble in a solvent orthogonal to the pyroelectric material.
A method for producing a thermal pattern sensor comprising several pixels, in which each pixel comprises at least one pyroelectric capacitance produced by the implementation of the following steps:
- producing at least one lower electrode on a substrate;
- producing at least one portion of pyroelectric material at least on the lower electrode, the at least one portion of pyroelectric material comprising a plurality of porosities and/or holes;
- producing at least one protective dielectric layer on the portion of pyroelectric material;
- and
- producing at least one upper electrode on the protective dielectric layer,
- wherein the at least one protective dielectric layer fills the plurality of porosities and/or holes, and
- wherein the protective dielectric layer comprises at least one of the following materials:
- self-assembled molecular monolayer, or dielectric material soluble in a solvent orthogonal to the pyroelectric material.
Dependencies are inferred from the claim text.