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US 11,237,000 B1Granted
Disk resonator gyroscope with out-of-plane electrodes
AssigneeHRL Laboratories, LLC
InventorsRaviv Perahia, Lian X. Huang, Logan D. Sorenson, Hung Nguyen, David T. Chang
Life of this patent
Estimating the term…
Abstract
A sensor comprising a resonator structure arranged for resonating along a first plane; and at least one sensing electrode arranged on a second plane parallel to said first plane at a predetermined distance of said resonator structure along a direction normal to said first plane.
Claims16
A sensor comprising:
- a resonator structure arranged for resonating along a first plane, said resonator structure comprising a first plurality of concentric rings attached to each other by a predetermined number of radial supports;
- and
- a second plurality of sensing electrode structures, arranged on a second plane parallel to said first plane at a predetermined distance of said resonator structure along a direction normal to said first plane such that a third plurality of rings of the resonator structure form an out-of-plane capacitance with said second plurality of sensing electrode structures.
A sensor comprising:
- a resonator structure arranged for resonating along a first plane;
- and
- at least one sensing electrode structure arranged on a second plane parallel to said first plane at a predetermined distance of said resonator structure along a direction normal to said first plane;
- wherein said at least one sensing electrode structure is a differential electrode comprising two conductors separated by a gap.
1 more element
A sensor comprising:
- a resonator structure arranged for resonating along a first plane;
- and
- at least one sensing electrode structure arranged on a second plane parallel to said first plane at a predetermined distance of said resonator structure along a direction normal to said first plane;
- wherein the resonator structure comprises a disk resonator having a peripheral support structure;
- and wherein:
- a baseplate wafer supports the disk resonator at the peripheral support structure;
- and
- a cap wafer covers the disk resonator, attached to the peripheral support structure;
- wherein the baseplate wafer, the cap wafer and the peripheral support structure form an enclosure of the disk resonator;
- and
- wherein said least one sensing electrode structure is arranged on one of said baseplate wafer and cap wafer inside said cavity.
8 more elements
A sensor comprising:
- a resonator structure arranged for resonating along a first plane;
- and
- at least one sensing electrode structure arranged on a second plane parallel to said first plane at a predetermined distance of said resonator structure along a direction normal to said first plane;
- wherein the resonator structure comprises a disk resonator;
- wherein the disk resonator comprises a central support;
- and wherein:
- a baseplate wafer supports the disk resonator at the central support;
- and
- a cap wafer covers the disk resonator;
- wherein the baseplate wafer and the cap wafer form an enclosure of the disk resonator, the cap wafer comprising a single wafer having a cavity forming a wall surrounding the disk resonator and the wall being bonded to the baseplate wafer to enclose the disk resonator;
- and
- wherein said least one sensing electrode is arranged on one of said baseplate wafer and cap wafer inside said cavity.
9 more elements
A sensor comprising:
- a resonator structure arranged for resonating along a first plane;
- and
- at least one sensing electrode structure arranged on a second plane parallel to said first plane at a predetermined distance of said resonator structure along a direction normal to said first plane;
- wherein the resonator structure comprises a disk resonator wherein the disk resonator comprises a number of concentric rings attached to each other by a predetermined number of radial supports, wherein the radial supports attaching any first and second concentric rings are not radially aligned with the radial supports attaching said second concentric ring to a third concentric ring.
1 more element
A method of fabricating a sensor, the method comprising:
- fabricating a disk resonator structure having a peripheral support structure and arranged for resonating along a first plane;
- and
- fabricating at least one sensing electrode structure on a second plane, parallel to said first plane, at a predetermined distance of said resonator structure along a direction normal to said first plane;
- the method further comprising:
- providing a baseplate wafer for supporting the disk resonator at the peripheral support structure;
- and
- attaching to the peripheral support structure a cap wafer covering the disk resonator;
- wherein the baseplate wafer, the cap wafer and the peripheral support structure form an enclosure of the disk resonator;
- wherein said fabricating at least one sensing electrode structure comprises fabricating said at least one sensing electrode structure on one of said baseplate wafer and cap wafer inside said cavity.
6 more elements
A method of fabricating a sensor, the method comprising:
- fabricating a disk resonator structure having a central support and arranged for resonating along a first plane;
- and
- fabricating at least one sensing electrode structure on a second plane, parallel to said first plane, at a predetermined distance of said resonator structure along a direction normal to said first plane;
- the method further comprising:
- providing a baseplate wafer for supporting the disk resonator at the central support;
- and
- providing a cap wafer covering the disk resonator;
- wherein the baseplate wafer and the cap wafer form an enclosure of the disk resonator, the cap wafer comprising a single wafer with a cavity forming a wall surrounding the disk resonator and the wall being bonded to the baseplate wafer to enclose the disk resonator;
- wherein said fabricating at least one sensing electrode structure comprises fabricating said at least one sensing electrode structure on one of said baseplate wafer and cap wafer inside said cavity.
6 more elements
Dependencies are inferred from the claim text.