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US 11,236,999 B1Granted
Low power inertial sensor architecture and methods
AssigneemCube Inc.
InventorsSanjay Bhandari, Chia-Din Ting
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Abstract
A controller for a MEMS gyroscope includes a first portion for generating a drive signal in response to an output from drive capacitors of the MEMS gyroscope, wherein the output signal has a resonant frequency and a phase, a second portion for determining a sampling signal in response to the output, wherein the sampling signal has a frequency that is a multiple of the resonant frequency, and has the phase, a multiplexer for outputting a multiplexed data comprising first data signals from first capacitors and second capacitors of the MEMS gyroscope multiplexed in response to the sampling signal, and a processing portion for reducing the resonant frequency from the multiplexed data.
Claims20
An integrated MEMS device comprises:
- a MEMS gyroscope comprising:
- a proof mass;
- a plurality of drive capacitors coupled to the proof mass, wherein the plurality of drive capacitors is configured to receive a drive signal, wherein the plurality of drive capacitors is configured to cause the proof mass to resonate in response to the drive signal and configured to produce an output signal comprising a resonant frequency and a first phase;
- and
- a plurality of sense capacitors coupled to the proof mass including a first set of sense capacitors configured to output first data associated with a first rotational axis and a second set of sense capacitors configured to output second data associated with a second rotational axis, both in response to physical perturbations to the integrated MEMS device, wherein the first data comprises movement data corresponding to the resonant frequency and a data frequency;
- and
- CMOS circuits coupled to and disposed below the MEMS gyroscope, wherein the CMOS circuits comprise:
- a first portion coupled to the plurality of drive capacitors, wherein the first portion is configured to generate the drive signal in response to the output signal;
- a second portion coupled to the plurality of drive capacitors, wherein the second portion is configured to determine a sampling signal in response to the output signal, wherein the sampling signal comprises a sampling frequency that is a multiple of the resonant frequency, and wherein the sampling signal comprises a phase determined according to the first phase;
- a multiplexer coupled to the first set of sense capacitors, the second set of sense capacitors, and the second portion, wherein the multiplexer is configured to output multiplexed data comprising the first data and the second data time multiplexed in response to the sampling signal;
- and
- a processing portion coupled to the multiplexer and to the second portion, wherein the processing portion is configured to reduce the resonant frequency from the multiplexed data and output processed data comprising the first data and the second data time multiplexed in response to the sampling signal.
9 more elements
A controller for a MEMS gyroscope, the controller comprising:
- a first portion coupled to a plurality of drive capacitors of the MEMS gyroscope, wherein the first portion is configured to generate a drive signal in response to an output signal from the plurality of drive capacitors, wherein the output signal comprises a resonant frequency and a first phase;
- a second portion coupled to the plurality of drive capacitors, wherein the second portion is configured to determine a sampling signal in response to the output signal, wherein the sampling signal comprises a sampling frequency that is a multiple of the resonant frequency of the output signal, and wherein the sampling signal comprises a phase determined according to the first phase;
- a multiplexer coupled to a first set of sense capacitors of the MEMS gyroscope, a second set of sense capacitors of the MEMS gyroscope and the second portion, wherein the multiplexer is configured to output multiplexed data comprising first data signals from the first set of sense capacitors and second data signals from the second set of sense capacitors multiplexed in response to the sampling signal;
- and
- a processing portion coupled to the multiplexer and to the second portion, wherein the processing portion is configured to reduce a component of the multiplexed data corresponding to the resonant frequency of the output signal from the multiplexed data and configured to output processed data signals comprising the first data signals and the second data signals time multiplexed in response to the sampling signal.
2 more elements
A method for a controller for a MEMS gyroscope, the method comprising:
- generating a drive signal comprising a resonant frequency and a first phase, in response to an output signal from a plurality of drive capacitors of the MEMS gyroscope;
- providing the drive signal to an input of the plurality of drive capacitors of the MEMS gyroscope;
- determining, using the output signal, a sampling signal comprising a sampling frequency and a phase determined according to the first phase, wherein the sampling frequency is a multiple of the resonant frequency;
- receiving first data signals from a first set of sense capacitors of the MEMS gyroscope;
- receiving second data signals from a second set of sense capacitors of the MEMS gyroscope;
- producing multiplexed data comprising a time multiplexed output comprising a portion of the first data signals and a portion of the second data signals;
- and
- producing, by reducing a component of the multiplexed data corresponding to the resonant frequency from the multiplexed data, processed data comprising the first data and the second data time multiplexed in response to the sampling signal.
5 more elements
Dependencies are inferred from the claim text.