Substrate processing apparatus and recording medium

A non-transitory computer-readable recording medium storing a program that causes a computer to perform a process in a substrate processing apparatus including a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe, and a storage part configured to store the acquired device data, the process comprising:

• acquiring device data, which includes a current value, a rotational speed, and a back pressure of an auxiliary pump, while executing the process recipe, and storing the acquired device data;
• acquiring the device data in a predetermined specific, step among the steps constituting the process recipe from the stored device data;
• calculating an average value for each of the device data acquired in the specific step;
• comparing the calculated average value with a previous average value for each of the device data acquired in the specific step during previous execution of the process recipe;
• and
• generating an alarm if it is determined that at least one of the following conditions is met:
• the calculated average value for the current value is larger than the previous average value for the current value and has been increased in succession for a preset number of times of executing the process recipe,
• the calculated average value for the back pressure is larger than the previous average value for the back pressure and has been increased in succession for a preset number of times of executing the process recipe, and
• the calculated average value for the rotational speed is smaller than the previous average value for the rotational speed and has been decreased in succession for a preset number of times of executing the process recipe.