Plasmonic diamond films and related methods
AssigneeWisconsin Alumni Research Foundation
InventorsRobert John Hamers, Shuo Li
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Abstract
Methods of forming plasmonic diamond films are provided. In an embodiment, such a method comprises forming a first layer of diamond on a substrate; depositing a layer of a metal on a surface of the first layer of diamond to form an as-deposited layer of metal; exposing the as-deposited layer of metal to a plasma treatment to convert the as-deposited layer of metal to a plurality of discrete regions of the metal on the surface of the first layer of diamond; and forming a second layer of diamond on the plurality of discrete regions of metal to form the plasmonic diamond film comprising a plurality of plasmonic nanoparticles.
Claims20
A method of forming a plasmonic diamond film, the method comprising:
- (a) forming a first layer of diamond on a substrate;
- (b) depositing a layer of a metal on a surface of the first layer of diamond to form an as-deposited layer of metal;
- (c) exposing the as-deposited layer of metal to a plasma treatment to convert the as-deposited layer of metal to a plurality of discrete regions of the metal on the surface of the first layer of diamond;
- and
- (d) forming a second layer of diamond on the plurality of discrete regions of metal to form the plasmonic diamond film comprising a plurality of plasmonic nanoparticles.
Dependencies are inferred from the claim text.