Liquid droplet discharging apparatus
AssigneeTokyo Electron Limited
InventorYousuke Mine
Life of this patent
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AssigneeTokyo Electron Limited
InventorYousuke Mine
Estimating the term…
A liquid droplet discharging apparatus includes a transfer device, a discharging head, a first medium supply, a second medium supply and an imaging device. The transfer device is configured to transfer a work along a transfer direction. The discharging head is configured to discharge a liquid droplet of a functional liquid to the work. The first medium supply is configured to supply a first inspection medium, which receives the liquid droplet, in a direction orthogonal to the transfer direction. The second medium supply is configured to supply a second inspection medium, which receives the liquid droplet and is arranged side by side with respect to the first inspection medium in the transfer direction, in the direction orthogonal to the transfer direction. The imaging device is configured to image the liquid droplet discharged to the first inspection medium and the liquid droplet discharged to the second inspection medium.
A liquid droplet discharging apparatus, comprising:
A liquid droplet discharging apparatus, comprising:
Dependencies are inferred from the claim text.