Back to results
US 11,235,574 B2Granted
Fluid propelling apparatus including a heat sink
AssigneeHewlett-Packard Development Company, L.P.
InventorsGarrett E. Clark, Michael W. Cumbie, Chien-Hua Chen
Life of this patent
Estimating the term…
Abstract
A fluid propelling apparatus, including a plastic compound, a MEMS at least partially surrounded by the compound, and a heat sink next to the MEMS, to transfer heat away from the MEMS, wherein the heat sink is at least partly surrounded by the compound.
Claims16
A fluid propelling apparatus, comprising
- a plastic compound structure having a first fluid channel;
- a MEMS embedded in the compound structure such that the MEMS is adjacent to the compound structure at three sides of the MEMS, the MEMS including a substrate, a second fluid channel fluidically connected to the first fluid channel, and a column of fluid propelling actuators in the second fluid channel, wherein the first fluid channel does not extend past the second fluid channel;
- and
- a heat sink, at least partly surrounded by the compound structure to transfer heat away from the MEMS, wherein
- the MEMS has a width less than 2.3 millimeters and a thickness less than 0.8 millimeters, and
- the actuators of the column have a density of at least 300 actuators per inch of length.
3 more elements
Method of manufacturing a fluid propelling apparatus, comprising
- providing, in a mold:
- a MEMS including a substrate, a fluid channel and a column of actuators in the fluid channel, the MEMS having a width less than 2.3 millimeters and a thickness less than 0.8 millimeters, the actuators of the column having a density of at least 300 actuators per inch of length,
- a heat sink, adjacent the MEMS to transfer heat away from the MEMS, and
- a plastic compound in an at least partly molten state;
- compressing and curing the compound in the mold so that the MEMS and heat sink are fixed in position in the compound after curing, the MEMS is embedded in a compound structure comprising the compound such that the MEMS is adjacent to the compound structure at three sides of the MEMS, and the heat sink is at least partly surrounded by the compound structure;
- and
- aligning a fluid channel in the compound structure with the fluid channel in the MEMS, the fluid channel in the compound structure not extending past the fluid channel in the MEMS.
4 more elements
Method of manufacturing a fluid propelling apparatus, comprising
- placing a fluid propelling MEMS and a heat sink against a release tape in a mold, wherein the MEMS has a width less than 2.3 millimeters and a thickness less than 0.8 millimeters, is largely composed of silicon, the MEMS having a fluid channel and a column of actuators in the fluid channel, the actuators of the column having a density of at least 300 actuators per inch of length;
- depositing a plastic compound in the mold to at least partially cover at least one of the MEMS and heat sink;
- compressing the compound in the mold so that it at least partially surrounds the MEMS and heat sink;
- curing the compound whereby the heat sink and MEMS are fixed in position in the compound, the MEMS is embedded in a compound structure comprising the compound such that the MEMS is adjacent to the compound structure at three sides of the MEMS, and the heat sink is at least partly surrounded by the compound structure;
- aligning a fluid channel in the compound structure with the fluid channel in the MEMS, the fluid channel in the compound structure not extending past the fluid channel in the MEMS;
- and
- releasing the release tape.
4 more elements
Dependencies are inferred from the claim text.