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US 11,235,495 B2Granted
Imprint system and article manufacturing meihod
AssigneeCanon Kabushiki Kaisha
InventorKiyohito Yamamoto
Life of this patent
Estimating the term…
Abstract
A replica manufacturing apparatus performs imprint processing of forming a pattern of an imprint material on a replica substrate using a master mold, processes the replica substrate with the formed pattern to manufacture a replica mold, and transfers data of a condition concerning the imprint processing to a management apparatus. An imprint apparatus acquires the data from the management apparatus, and performs the imprint processing of forming a pattern of an imprint material on a substrate using the replica mold.
Claims11
An imprint system comprising:
- a replica manufacturing apparatus configured to manufacture a replica mold using a master mold;
- an imprint apparatus configured to perform imprint processing of forming a pattern of an imprint material on a substrate using the replica mold;
- and
- a management apparatus communicably connected to the replica manufacturing apparatus and the imprint apparatus,
- wherein the replica manufacturing apparatus comprises a supply unit configured to supply an imprint material onto a replica substrate and is configured to perform imprint processing of forming a pattern of the imprint material on the replica substrate using the master mold, process the replica substrate with the formed pattern to manufacture the replica mold, and transfer data of a condition concerning the imprint processing to the management apparatus,
- wherein the condition includes an arrangement condition that defines supply of the imprint material onto the replica substrate by the supply unit, and
- wherein the imprint apparatus is configured to acquire the data from the management apparatus, and perform the imprint processing of forming the pattern of the imprint material on the substrate using the replica mold in accordance with the condition included in the acquired data.
4 more elements
An article manufacturing method of manufacturing an article, comprising:
- causing a replica manufacturing apparatus to supply an imprint material onto a replica substrate from a supply unit, perform imprint processing of forming a pattern of the imprint material on the replica substrate using a master mold, and process the replica substrate with the formed pattern to manufacture a replica mold;
- causing the replica manufacturing apparatus to transfer data of a condition concerning the imprint processing from the replica manufacturing apparatus to a management apparatus, the condition including an arrangement condition that defines supply of the imprint material onto the replica substrate by the supply unit;
- causing an imprint apparatus to acquire the data from the management apparatus;
- causing the imprint apparatus to form a pattern of an imprint material on a substrate using the replica mold in accordance with the condition concerning the imprint processing, which is included in the acquired data;
- and
- processing the substrate with the formed pattern,
- wherein the article is manufactured from the processed substrate.
4 more elements
Dependencies are inferred from the claim text.