Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
AssigneeASML Netherlands B.V.
InventorsRaymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg
Life of this patent
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Abstract
A substrate holder for a lithographic apparatus has a main body having a thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or electric component such as an electrode, a sensor, a heater, a transistor or a logic device, and has a top isolation layer. A plurality of burls to support a substrate are formed on the thin-film stack or in apertures of the thin-film stack.
Claims21
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body having a first side of the main body and a side of the main body opposite to the first side;
- a plurality of first burls at the first side of the main body and having end surfaces to support a substrate in the lithographic apparatus, wherein each of the first burls comprise a lower portion protruding from the main body and an upper portion above the lower portion, wherein the lower portions are a different material than the upper portions, the upper portions comprise diamond-like carbon;
- a plurality of second burls at a second side of the main body;
- and
- a heater provided to the main body and configured to control a temperature of the substrate and/or the main body.
A method of manufacturing a substrate holder for use in a lithographic apparatus, the method comprising:
- forming a plurality of first burls protruding from a main body at a first side of the main body, the forming comprising:
- forming a lower portion, protruding from the main body, of each of the first burls, and
- forming, on each lower portion, an upper portion above the respective lower portion,
- forming a plurality of second burls at a second side of the main body;
- and
- providing a heater to the main body,
- wherein the lower portions are a different material from the upper portions, the upper portions comprise diamond-like carbon, and the upper portions are separated from each other.
A substrate holder for use in a lithographic apparatus, the substrate holder comprising:
- a main body;
- a plurality of first burls at a first side of the main body and having end surfaces to support a substrate in the lithographic apparatus, wherein each of the first burls comprise a lower portion protruding from the main body and an upper portion above the lower portion, wherein the lower portions are a different material than the upper portions, the upper portions comprise diamond-like carbon and the lower portions are separated from each other by an open gap between them;
- and
- a plurality of second burls at a second side of the main body.
Dependencies are inferred from the claim text.