Method of operating a charged particle gun, charged particle gun, and charged particle beam device
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorDieter Winkler
Life of this patent
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Abstract
A charged particle gun for a charged particle beam device is described. The charged particle gun includes a gun housing; an emitter provided in the gun housing, the emitter being configured to emit a charged particle beam along an axis; an emitter power supply connected to the emitter; a trapping electrode provided in the gun housing, the trapping electrode at least partially surrounding the axis; a trapping power supply connected to the trapping electrode; and a shielding element shielding an electrostatic field of the trapping electrode from the axis during operation of the gun housing.
Claims16
A charged particle gun for a charged particle beam device, comprising:
- a gun housing;
- an emitter provided in the gun housing, the emitter being a field emitter configured to emit a charged particle beam along an axis;
- an emitter power supply connected to the emitter;
- a trapping electrode provided in the gun housing, the trapping electrode at least partially surrounding the axis;
- a trapping power supply connected to the trapping electrode;
- and
- a shielding element shielding an electrostatic field of the trapping electrode from the axis during operation of the gun housing.
A charged particle beam device, comprising:
- a charged particle gun for the charged particle beam device, the charged particle gun, comprising:
- a gun housing;
- an emitter provided in the gun housing, the emitter being a field emitter configured to emit a charged particle beam along an axis;
- an emitter power supply connected to the emitter;
- a trapping electrode provided in the gun housing, the trapping electrode at least partially surrounding the axis;
- a trapping power supply connected to the trapping electrode;
- and
- a shielding element shielding an electrostatic field of the trapping electrode from the axis during operation of the gun housing;
- the charged particle beam device further comprising:
- a charged particle beam column for guiding charged particles on a specimen.
Dependencies are inferred from the claim text.