Liquid chemical vapor recovery device, wet stripping device, photoresist stripping process, and method for manufacturing thin film transistor-liquid crystal display using the same

A wet stripping device comprising:

• a stripping chamber;
• a liquid chemical storage tank;
• a chemical supply system for supplying a liquid chemical from the liquid chemical storage tank to the stripping chamber;
• a self-reflux system for self-refluxing the liquid chemical in the stripping chamber to the liquid chemical storage tank;
• and
• a liquid chemical vapor recovery device connected between the stripping chamber and the liquid chemical storage tank, the liquid chemical vapor recovery device comprising:
• an exhaust pipe for discharging a gas in the stripping chamber, the gas comprising a vapor of the liquid chemical, wherein the exhaust pipe comprises:
• a first horizontal section and a second horizontal section connected by a vertical section, wherein
• the first horizontal section is connected to the stripping chamber;
• an upper end of the vertical section is connected to the first horizontal section;
• and
• the second horizontal section is connected to a lower end of the vertical section such that a gas flow discharged from the stripping chamber first passes through the first horizontal section, then into the vertical section, then into the second horizontal section;
• a reflux pipe for refluxing liquid chemical condensed in the exhaust pipe to the liquid chemical storage tank, the reflux pipe having an inlet connected to the second horizontal section of the exhaust pipe and an outlet connected to the liquid chemical storage tank;
• and
• a block provided on an inner wall of the second horizontal section of the exhaust pipe and located at a position downstream of the inlet of the reflux pipe, said block being a protuberance protruding from the inner wall of the exhaust pipe toward the interior of the exhaust pipe,
• wherein, at least a part of the exhaust pipe positioned upstream of the inlet of the reflux pipe is formed as a pipe segment with a rugged inner surface.