Device for measuring an electric field
AssigneeDonau-Universitaet Krems
InventorsWilfried Hortschitz, Michael Stifter, Harald Steiner
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AssigneeDonau-Universitaet Krems
InventorsWilfried Hortschitz, Michael Stifter, Harald Steiner
Estimating the term…
A device for measuring an electric field includes a micromechanical structure made of a material that is electrically conductive at an operating temperature. The micromechanical structure has a frame portion and a movable portion; the movable portion is electrically conductively and mechanically elastically connected to the frame portion and can be moved relative to the frame portion; the micromechanical structure is designed so that, when the micromechanical structure is arranged in the electric field, an electrical polarization of the micromechanical structure occurs by a first field intensity component not equal to zero and is parallel to a first direction, the electrical polarization causing a first force component acting on the movable portion parallel to the first direction and a change in the spatial arrangement of the movable portion relative to the frame portion dependent on the first force component. A detector determines the change.
A device for measurement of an electric field, the device comprising a micromechanical structure, which extends in a first direction, a second direction and a third direction;
Dependencies are inferred from the claim text.