MEMS structure for offset minimization of out-of-plane sensing accelerometers

A microelectromechanical systems (MEMS) apparatus comprising:

• a reference MEMS structure located in a plane above a MEMS substrate, wherein the reference MEMS structure is anchored to the MEMS substrate;
• a sensing MEMS structure located substantially in the plane above the MEMS substrate, wherein the sensing MEMS structure is configured to move in response to an external load applied to the MEMS apparatus, wherein the reference MEMS structure and the sensing MEMS structure are each configured as respective sets of arms arranged as an interdigitated set of arms extending radially around a center of the reference MEMS structure;
• a flexible coupling configured to suspend the sensing MEMS structure above the MEMS substrate;
• a plurality of sense electrodes located parallel to the sensing MEMS structure configured to sense position of the sensing MEMS structure;
• and
• a plurality of reference electrodes located parallel to the reference MEMS structure configured to sense deformation of the MEMS substrate.