Acceleration sensor, capacitance detection circuit and method, acceleration processing circuit and method, storage medium and electronic device

A capacitance detection circuit for monitoring a capacitance value of a capacitor of an acceleration sensor,

• wherein the acceleration sensor comprises:
• a base;
• at least one fixed electrode fastened on the base;
• and
• at least one mass, movable relative to the fixed electrode,
• wherein the mass comprises a conductive electrode, the conductive electrode and the fixed electrode are configured to form the capacitor, and the capacitance value of the capacitor is variable due to movement of the mass relative to the base,
• wherein an overlapping area of an orthographic projection of the conductive electrode and an orthographic projection of the fixed electrode is variable, the orthographic projection of the conductive electrode is a projection of the conductive electrode on a surface of the base along a direction perpendicular to the base, and the orthographic projection of the fixed electrode is a projection of the fixed electrode on the surface of the base along the direction perpendicular to the base,
• wherein the capacitance detection circuit comprises:
• a first capacitor and a detection sub-circuit,
• wherein two terminals of the first capacitor are electrically connected to the fixed electrode and the conductive electrode of the acceleration sensor, respectively, and
• the detection sub-circuit is configured to convert a capacitance value of the first capacitor into a detection signal and output the detection signal,
• wherein the detection sub-circuit comprises:
• a first switch, a second switch, a third switch, a second capacitor, a resistor, a generation sub-circuit and a storage sub-circuit,
• wherein the first capacitor is configured to:
• charge in response to a case where the first switch is turned on, and
• discharge in response to a case where the first switch is turned off and the second switch and the third switch both are turned on, and charge the second capacitor,
• wherein the generation sub-circuit is configured to generate the detection signal according to a voltage of the second capacitor and a reference voltage, the detection signal generated is at a first level in a case where the voltage of the second capacitor is lower than the reference voltage, and the detection signal generated is at a second level in a case where the voltage of the second capacitor is not lower than the reference voltage,
• wherein the second capacitor is configured to discharge through the resistor in response to a case where the detection signal is at the second level, and
• wherein the storage sub-circuit is configured to buffer and output the detection signal.