Back to results
US 11,231,438 B2Granted
Inertial sensor, electronic device, and vehicle
AssigneeSeiko Epson Corporation
InventorFumiya Ito
Life of this patent
Estimating the term…
Abstract
An inertial sensor includes a substrate, a first detection element that is provided on a first surface of the substrate and includes a first movable portion displaceable with respect to the substrate and a first fixed portion connected to the first movable portion and fixed to the substrate, and a second detection element that is provided on a second surface in a front-back relationship with the first surface and includes a second movable portion displaceable with respect to the substrate and a second fixed portion connected to the second movable portion and fixed to the substrate.
Claims11
An inertial sensor comprising:
- a substrate;
- a first detection element that is provided on a first surface of the substrate and includes a first movable portion displaceable with respect to the substrate and a first fixed portion connected to the first movable portion and fixed to the substrate;
- and
- a second detection element that is provided on a second surface in a front-back relationship with the first surface and includes a second movable portion displaceable with respect to the substrate and a second fixed portion connected to the second movable portion and fixed to the substrate.
1 more element
Dependencies are inferred from the claim text.