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US 11,231,388 B2Granted
Chemical sensor with air via
AssigneeLife Technologies Corporation
InventorsJames Li, Jordan Owens, James Bustillo
Life of this patent
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Abstract
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.
Claims21
A chemical sensor comprising:
- a chemically-sensitive field effect transistor (chemFET) including a floating gate conductor in a substrate;
- the floating gate conductor having an upper surface;
- a metal layer disposed over the top of the upper surface of the floating gate conductor;
- a liner layer disposed over the metal layer;
- an air via formed in a layer of a first material disposed over the substrate, thereby covering the metal layer and liner layer, wherein the air via is formed through to the liner layer;
- and
- a microwell formed in a layer of a second material disposed over the first material, wherein a bottom of the microwell is formed through to at least a top surface of the first material.
4 more elements
Dependencies are inferred from the claim text.