On-line sealing detecting device, multi-section-type seal chamber processing equipment and method

An on-line sealing detecting device, which is set on a butting surface of two vacuum cavities, comprising:

• a seal ring installed in the butting surface of the two vacuum cavities, and
• a circumferential chamber, which is set in the seal ring;
• an inlet and outlet unit connected with an inner of the chamber;
• and
• one detection unit, which is set on the inlet and outlet unit, wherein the detection unit is connected with a processor through electric connection and is used for detecting a gas pressure value and/or a gas concentration value in the inlet and outlet unit, and for sending the gas pressure value and/or the gas concentration value to the processor,
• wherein the inlet and outlet unit comprises an inlet control unit and an outlet control unit, the inlet control unit and the outlet control unit connect are disposed on the inlet and outlet unit, the inlet control unit and the outlet control unit connect with the processor through electric connection, and wherein the processor, after receiving the gas pressure value and/or the gas concentration value, compares it with a preset value in the processor, and wherein the processor controls the inlet control unit and the outlet control unit through the inlet and outlet unit to increase gas or reduce gas in the chamber according to comparison results.