Thrust measuring device

A thrust measuring device, comprising a movabler and a stationaror,

• said movabler being provided with:
• movable-side coils or movable-side magnets that are placed correspondingly to stationary-side magnets or stationary-side coils in a linear motor formed in an arc shape in horizontal directions;
• a pressure sensor or a force sensor for measuring thrust of the linear motor;
• a perpendicular-side first hydrostatic pad that holds the movable-side magnets or the movable-side coils at a fixed height;
• a horizontal-side first hydrostatic plate and/or a horizontal-side first hydrostatic pad that is placed on each of lateral sides of the movabler and has an arc shape for causing it to move in a manner matched to a shape of the stationary-side magnets or the stationary-side coils,
• and said stationaror being provided with:
• a base on which the stationary-side magnets or the stationary-side coils in the linear motor, and a perpendicular-side first hydrostatic plate in a flat-plate shape, that is opposite to the perpendicular-side first hydrostatic pad, are placed;
• first and second walls on each of which a horizontal-side second hydrostatic pad and/or a horizontal-side second hydrostatic plate having an arc shape that is opposite to the horizontal-side first hydrostatic plate and/or the horizontal-side first hydrostatic pad, is placed;
• and
• a third wall to which an actuator coupled through a joint to the pressure sensor or the force sensor, for moving the movabler in a movement direction thereof, and a position sensor for measuring a position of the movabler, are attached.

A thrust measuring device, comprising a movabler and a stationaror,

• said movabler being provided with:
• movable-side coils or movable-side magnets that are placed correspondingly to stationary-side magnets or stationary-side coils in a linear motor arranged in an arc shape in perpendicular directions;
• a pressure sensor or a force sensor for measuring thrust of the linear motor;
• a perpendicular-side first hydrostatic pad that holds the movable-side coils or the movable-side magnets at a fixed height, and that has an arc shape for causing it to move in a manner matched to a shape of the stationary-side magnets or the stationary-side coils in the arc shape;
• and
• a horizontal-side first hydrostatic plate and/or a horizontal-side first hydrostatic pad in a flat-plate shape that is placed on each of lateral sides of the movabler;
• and said stationaror being provided with:
• a base on which the stationary-side magnets or the stationary-side coils in the linear motor, and a perpendicular-side first hydrostatic plate having an arc shape that is opposite to the perpendicular-side first hydrostatic pad, are placed;
• first and second walls on each of which a horizontal-side second hydrostatic pad and/or a horizontal-side second hydrostatic plate that is opposite to the horizontal-side first hydrostatic plate and/or the horizontal-side first hydrostatic pad, is placed;
• and
• a third wall to which an actuator coupled through a joint to the pressure sensor or the force sensor, for moving the movabler in a movement direction thereof, and a position sensor for measuring a position of the movabler, are attached.