Composite seal member
AssigneeValqua, Ltd.
InventorsSangho Kim, Michi Kuroda, Nobuhiro Yoshida, Ippei Nakagawa
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AssigneeValqua, Ltd.
InventorsSangho Kim, Michi Kuroda, Nobuhiro Yoshida, Ippei Nakagawa
Estimating the term…
Provided is a composite seal member that can maintain performance such as vacuum seal performance, plasma resistance, and corrosive gas resistance over a long period. The composite seal member is mounted in a seal groove provided in a body surface of a first member, and establishes a sealed state between the first member and a second member when the second member is moved closer toward the first member. The composite seal member includes a first seal member disposed on the side of a first side wall of the seal groove and made of an elastic member, and a second seal member disposed on the side of a second side wall of the seal groove and made of a material that is harder than the first seal member. The second seal member has at least a second side wall abutment surface that extends generally in parallel with and makes surface contact with the second side wall of the seal groove, and a seal abutment surface that extends generally in parallel with a seal surface of the second member, and that makes surface contact with the seal surface of the second member in the sealed state.
A composite seal member that is mounted in a seal groove provided in a body surface of a first member and that establishes a sealed state between the first member and a second member when the second member is moved closer toward the first member, characterized in that
Dependencies are inferred from the claim text.