Substrate plating method
AssigneeShinko Electric Industries Co., Ltd.
InventorKatsuya Kubo
Life of this patent
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Abstract
A substrate plating method includes forming a first resist film exposing a first feeding layer on a first face of a substrate; forming a second resist film exposing a second feeding layer on a second face of the substrate opposite to the first face; holding the substrate with a clamp member in such a manner that the clamp member is in contact with the first feeding layer and the second feeding layer, and arranging a first electrode in opposed relation with the first face and a second electrode in opposed relation with the second face; and forming a plating layer on a plating-scheduled region of the first face under conditions in which a value of current supplied between the second face and the second electrode is larger than a value of current supplied between the first face and the first electrode.
Claims7
A substrate plating method comprising:
- forming a first resist film on a first face of a substrate in such a manner that the first resist film has an opening on a plating-scheduled region of the first face and exposes a first feeding layer in at least a portion of an outer edge of the first face;
- forming a second resist film on a second face of the substrate opposite to the first face in such a manner that the second resist film exposes a second feeding layer in at least a portion of an outer edge of the second face;
- holding the substrate with a clamp member in such a manner that the clamp member is in contact with the first feeding layer and the second feeding layer, and arranging a first electrode in opposed relation with the first face of the substrate and a second electrode in opposed relation with the second face of the substrate;
- and
- forming a plating layer on the plating-scheduled region of the first face while using the first resist film as a mask under conditions in which a value of current supplied between the second face of the substrate and the second electrode is larger than a value of current supplied between the first face of the substrate and the first electrode.
Dependencies are inferred from the claim text.