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US 11,230,489 B2Granted
Method for manufacturing porous glass fine particle body, manufacturing apparatus for porous glass fine particle body, and method for manufacturing glass preform
AssigneeFujikura Ltd.
InventorNobutoshi Sato
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Abstract
A method for manufacturing a porous glass fine particle body including: forming a deposit layer of glass fine particles, generated from raw material gas including a silicon-containing organic compound, on a rotary starting member; supplying the raw material gas to a burner; switching the raw material gas to purge gas; supplying the purge gas to the burner at a first flow rate when the raw material gas is discharged from inside the burner; and switching the first flow rate to a second flow rate smaller than the first flow rate.
Claims13
A method for manufacturing a porous glass fine particle body, the method comprising:
- forming a deposit layer of glass fine particles, generated from raw material gas including a silicon-containing organic compound, on a rotary starting member;
- supplying the raw material gas to a burner;
- switching the raw material gas to purge gas;
- supplying the purge gas to the burner at a first flow rate when the raw material gas remaining in the burner is discharged from inside the burner;
- and
- switching the first flow rate to a second flow rate smaller than the first flow rate, wherein the second flow rate is greater than 0 L/min.
3 more elements
Dependencies are inferred from the claim text.