Substrate conveyance device

A substrate conveyance device, comprising:

• a carrying platform, configured to support a substrate;
• a conveying mechanism, disposed below the carrying platform and configured to convey the carrying platform;
• and
• oppositely disposed guiding mechanisms, disposed on both sides of the carrying platform in a conveying direction, respectively,
• wherein first magnetic field generators are disposed on both sides of the carrying platform in the conveying direction, and the guiding mechanism includes second magnetic field generators adjacent to the first magnetic field generators and disposed oppositely to the first magnetic field generators, respectively, such that the first magnetic field generator and the second magnetic field generator which are adjacent to each other have the same polarity, and
• wherein each of the first magnetic field generator and the second magnetic field generator includes a plurality of magnets spaced apart along the conveying direction, and a pitch of the magnets of the first magnetic field generator is smaller than that of the magnets of the second magnetic field generator.