Substrate storage container with umbrella-shaped seal lip
AssigneeShin-Etsu Polymer Co., Ltd.
InventorOsamu Ogawa
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AssigneeShin-Etsu Polymer Co., Ltd.
InventorOsamu Ogawa
Estimating the term…
Corrosion resistance of valves is enhanced, while ensuring the check valve function of the valves against an inflow of outside air. Disclosed is a substrate storage container that includes: a container body for storing at least one substrate; a lid for closing an opening of the container body; and at least one valve for controlling gas flow to the container body or from the container body. The at least one valve includes an elastic, non-metallic seal lip in a communication passage that extends in a first direction and communicates between an outside of the container body and an inside of the container body. The seal lip has an umbrella-like form which closes on one side in the first direction and opens on the other side in the first direction, the seal lip abutting an inner peripheral wall of the communication passage on the other side.
A substrate storage container, comprising:
Dependencies are inferred from the claim text.