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US 11,230,098 B2Granted
Passivation stacks
AssigneeHewlett-Packard Development Company, L.P.
InventorsZhizhang Chen, Lawrence H. White
Life of this patent
Estimating the term…
Abstract
A passivation stack can include a laminated film, including from 8 to 40 alternating layers of HfO2 and SiO2. The layers can individually have a thickness from 8 Angstroms to 40 Angstroms, and the laminated film can have a total thickness of 280 Angstroms to 600 Angstroms. The passivation stack can also include a barrier film of HfO2 having a thickness from 50 Angstroms to 300 Angstroms applied to the laminated film.
Claims15
A passivation stack, comprising:
- a laminated film, including from 8 to 40 alternating layers of HfO2 and SiO2, wherein the layers individually have a thickness from 8 Angstroms to 40 Angstroms, and wherein the laminated film has a total thickness of 280 Angstroms to 600 Angstroms;
- and
- a barrier film of HfO2 having a thickness from 50 Angstroms to 300 Angstroms applied to the laminated film.
A fluidic die, comprising:
- a substrate;
- a resistor positioned on the substrate;
- an
- a passivation stack positioned on resistor, the passivation stack, comprising:
- a laminated film, including from 8 to 40 alternating layers of HfO2 and SiO2, wherein the layers individually have a thickness from 8 Angstroms to 40 Angstroms, and wherein the laminated film has a total thickness of 280 Angstroms to 600 Angstroms;
- and
- a barrier film of HfO2 having a thickness from 50 Angstroms to 300 Angstroms applied to the laminated film.
4 more elements
A method of manufacturing a fluidic die, comprising:
- building up a laminated film on a resistor using Atomic Layer Deposition, wherein the laminated film includes from 8 to 40 alternating layers of HfO2 and SiO2 with individual layers having a thickness from 8 Angstroms to 40 Angstroms, and wherein the laminated film has a total thickness of 280 Angstroms to 600 Angstroms;
- and
- applying a barrier film of HfO2 having a thickness from 50 Angstroms to 300 Angstroms to the laminated film.
Dependencies are inferred from the claim text.